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Title:
【発明の名称】電子ビーム物理蒸着装置及びその制御パネル
Document Type and Number:
Japanese Patent JP2003522291
Kind Code:
A
Inventors:
Bruce, Robert William
Evans, John Douglas, Senior
Maricocchi, Antonio Frank
Application Number:
JP2001515347A
Publication Date:
July 22, 2003
Filing Date:
August 03, 2000
Export Citation:
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Assignee:
GENERAL ELECTRIC COMPANY
International Classes:
F01D25/00; C23C14/24; C23C14/30; C23C14/56; F02C7/00; H01J37/30; H01J37/305; H01J37/317; (IPC1-7): C23C14/30; F01D25/00; F02C7/00
Domestic Patent References:
JPH10237646A1998-09-08
JPH10171531A1998-06-26
JPH1011133A1998-01-16
JPH05341770A1993-12-24
Attorney, Agent or Firm:
Kenichi Matsumoto



 
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