Title:
【発明の名称】プラズマ処理方法および装置
Document Type and Number:
Japanese Patent JP2003532537
Kind Code:
A
Abstract:
A plasma processing apparatus includes a first chamber having a first wall with an inner peripheral surface and an outlet. A plurality of fluid supplying outlets are disposed along the first wall and are configured to supply a cooling fluid into the first chamber that travels in a circumferential direction around the inner peripheral surface of the first wall and in a direction towards the outlet. The cooling fluid exiting the plurality of fluid supplying outlets forms a cooling layer for cooling the inner peripheral surface of the first wall, and the outlet is configured for allowing the cooling fluid to exit therethrough while retaining the plasma within the chamber.
Inventors:
Robert Earl Shuey
Michael lee flame
Rick Be Spielman
Michael lee flame
Rick Be Spielman
Application Number:
JP2001583109A
Publication Date:
November 05, 2003
Filing Date:
May 07, 2001
Export Citation:
Assignee:
Esox Research and Development Incorporated
International Classes:
B01J3/00; B01J19/08; G21B1/13; H05H1/24; H05H1/46; (IPC1-7): B01J19/08; B01J3/00; H05H1/24
Attorney, Agent or Firm:
Masatake Shiga (7 outside)