Title:
【発明の名称】電子ビーム遮蔽装置及び電子ビームの遮蔽方法
Document Type and Number:
Japanese Patent JP2003532856
Kind Code:
A
Abstract:
Apparatus and methods for limiting interaction of electron beams produced by adjacent electron bean guns mounted within a vacuum chamber of a furnace. The apparatus may include one or more barriers that are suspended within the vacuum chamber between adjacent electron beam guns. The methods may include suspending one or more vertically extending barriers with the vacuum chamber between adjacent electron beam guns.
Inventors:
Grosse, Ingo Aye
Hall mark
Heinz, Leonardo See the Second
Hall mark
Heinz, Leonardo See the Second
Application Number:
JP2001511709A
Publication Date:
November 05, 2003
Filing Date:
July 14, 2000
Export Citation:
Assignee:
81 Properties Incorporated
International Classes:
G21K5/04; F27B17/00; F27D11/08; H01J37/09; H01J37/30; H01J37/305; (IPC1-7): F27D11/08; F27B17/00; G21K5/04; H01J37/09; H01J37/30
Domestic Patent References:
| JPS5611551B2 | 1981-03-14 | |||
| JPH03191290A | 1991-08-21 | |||
| JPH06504325A | 1994-05-19 |
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)