Title:
【発明の名称】金ゲルマニューム隔離ろう付け結合を有するサファイヤ圧力センサ用梁
Document Type and Number:
Japanese Patent JP2003534529
Kind Code:
A
Abstract:
A pressure sensor capsule with a beam shaped sensor body, made of direct bonded layers of single crystal sapphire, surrounding a hollow central channel. A first beam end receives pressure and a second beam end has electrical contact pads and there is a mounting surface between the ends. The central channel has a narrower width passing through the mounting surface. An isolation plate is brazed to the mounting surface. Pressure sensing film is in the first end with leads extending through the channel to the electrical contact pads. The beam having a notch at the second end, forming an isolated lead surface on the central channel where the electrical contact pads are accessible.
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Inventors:
Sittler, Fred, Sea.
Application Number:
JP2001550005A
Publication Date:
November 18, 2003
Filing Date:
December 20, 2000
Export Citation:
Assignee:
Rosemount Incorporated
International Classes:
G01L9/00; G01L13/06; G01L19/14; G01L9/12; (IPC1-7): G01L9/12; G01L13/06
Domestic Patent References:
| JPH04106442A | 1992-04-08 | |||
| JPH06265428A | 1994-09-22 | |||
| JPH0574977A | 1993-03-26 | |||
| JPH11501123A | 1999-01-26 | |||
| JPH0755616A | 1995-03-03 | |||
| JPH04328437A | 1992-11-17 | |||
| JPH08507854A | 1996-08-20 |
Attorney, Agent or Firm:
Kazuki Tanaka (2 outside)