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Title:
改良された試験構造および検査方法並びに利用方法
Document Type and Number:
Japanese Patent JP2004501505
Kind Code:
A
Inventors:
Satya Akera Vis.
Focus Gustavo A.
Adler David El.
Long Robert Thomas
Richardson Nail
Weiner Kurt H.
Walker David Jay.
Mantaras Linda Sea.
Application Number:
JP2001577600A
Publication Date:
January 15, 2004
Filing Date:
December 14, 2000
Export Citation:
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Assignee:
KLA-Tenker Technology Corporation
International Classes:
H01L21/66; H01L23/544; (IPC1-7): H01L21/66
Domestic Patent References:
JPH1197499A1999-04-09
JP2000040485A2000-02-08
JP2000081324A2000-03-21
JPH09282349A1997-10-31
JPH06207914A1994-07-26
JPH11219997A1999-08-10
JPH11242943A1999-09-07
JP2000081324A2000-03-21
JPH09282349A1997-10-31
JPH1197499A1999-04-09
JP2000040485A2000-02-08
Attorney, Agent or Firm:
Meisei International Patent Office



 
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