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Title:
滑り特性が向上したDLC層システム、およびそのような層システムを生成するためのプロセス
Document Type and Number:
Japanese Patent JP2004501793
Kind Code:
A
Abstract:
Layer system consists of an adhesion layer, a transition layer and a covering layer arranged on a substrate. The adhesion layer comprises a 4, 5 or 6 sub-group element and silicon, the transition layer comprises a 4, 5 or 6 sub-group element and silicon and carbon, and the covering layer comprises carbon which is similar to diamond. The system has a hardness of at least 15, preferably 20 GPa, and an adhesion of at least 3 HF. Independent claims are also included for: (a) a process for the production of the layer system; and (b) a device for carrying out the process comprising a vacuum chamber (1) having a pump system (9) for producing a vacuum in the chamber, substrate holders (3), a gas supply unit (8) for process gas, a vaporizer (14), an electric arc production device (10, 13), a device for producing a substrate bias voltage, and magnetic field producing devices (17). Preferred Features: The layers are applied by plasma-supported vaporization.

Inventors:
Masler, Orraf
Pedrazzini, Mauro
Ball love, christian
Eberle, Hubert
Griske, Martin
Michler, Torsten
Application Number:
JP2001576965A
Publication Date:
January 22, 2004
Filing Date:
December 27, 2000
Export Citation:
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Assignee:
Unakis Balzers Akchengezel Shaft
International Classes:
B32B9/00; C23C14/02; C23C14/06; C23C14/35; C23C16/02; C23C16/26; C23C16/27; C23C16/50; H01J37/32; (IPC1-7): B32B9/00; C23C14/06; C23C16/27; C23C16/50
Domestic Patent References:
JP2000008155A2000-01-11
JPH0863840A1996-03-08
JPH06212429A1994-08-02
JPH1192935A1999-04-06
JPH1082390A1998-03-31
JPH11100294A1999-04-13
Foreign References:
WO1996028270A11996-09-19
Attorney, Agent or Firm:
Fukami Hisaro
Morita Toshio
Yoshihei Nakamura
Yui Horii
Noto Kuto
Sakai Masayuki



 
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