Title:
位置測定装置及び位置を測定する方法
Document Type and Number:
Japanese Patent JP2004513357
Kind Code:
A
Abstract:
A method for position determination in a position measuring device that includes digitizing analog position data from a detector unit within time intervals of an internal clock rate and calculating position data from the digitized data. Determining a period of time Deltat between a pulse of the internal clock until an appearance of an external trigger signal and a processing of at least two position data, together with the period of time Deltat.
Inventors:
Hoover-Lenk Herbert
Drescher Jörg
House Schmid Mathias
Reiter Herbert
Strite Visor Johann
Holz Apfel Wolfgang
Drescher Jörg
House Schmid Mathias
Reiter Herbert
Strite Visor Johann
Holz Apfel Wolfgang
Application Number:
JP2002541343A
Publication Date:
April 30, 2004
Filing Date:
September 15, 2001
Export Citation:
Assignee:
DR. JOHANNES HEIDENHAIN GESELLSCHAFT MIT BESCHRANKTER HAFTUNG
International Classes:
G01B21/00; G01D5/244; G01D5/245; G03F7/20; G03F9/00; H01L21/027; (IPC1-7): G01B21/00; G01D5/245; H01L21/027
Domestic Patent References:
| JPS6475912A | 1989-03-22 |
Foreign References:
| US5391970A | 1995-02-21 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Tsuneo Mihara
Okumura Yoshimichi
Blacksmith
Tsuneo Mihara
Okumura Yoshimichi
Blacksmith