Title:
自己配列磁気クラッド書き込み線およびその方法
Document Type and Number:
Japanese Patent JP2004514286
Kind Code:
A
Abstract:
A self-aligned magnetic clad bit line structure ( 274 ) for a magnetic memory element ( 240 a) and its method of formation are disclosed, wherein the self-aligned magnetic clad bit line structure ( 274 ) extends within a trench ( 258 ) and includes a conductive material ( 264 ), magnetic cladding sidewalls ( 262 ) and a magnetic cladding cap ( 252 ). The magnetic cladding sidewalls ( 262 ) at least partially surround the conductive material ( 264 ) and the magnetic cladding cap ( 252 ) is substantially recessed within the trench with respect to the top of the trench.
Inventors:
Jones, Robert E.
Baron, Carroll Sea.
Lacokey, Eric Di.
Melnik, Bradley M.
Baron, Carroll Sea.
Lacokey, Eric Di.
Melnik, Bradley M.
Application Number:
JP2002543677A
Publication Date:
May 13, 2004
Filing Date:
November 08, 2001
Export Citation:
Assignee:
MOTOROLA INCORPORATRED
International Classes:
H01L27/105; H01L21/8246; H01L27/22; H01L43/08; (IPC1-7): H01L27/105; H01L43/08
Domestic Patent References:
| JPH08124926A | 1996-05-17 | |||
| JPH08222569A | 1996-08-30 | |||
| JPH10261635A | 1998-09-29 |
Foreign References:
| WO2000052701A1 | 2000-09-08 | |||
| WO2000038191A1 | 2000-06-29 | |||
| WO2000010172A2 | 2000-02-24 |
Attorney, Agent or Firm:
Mamoru Kuwagaki