Title:
可変容量コンデンサを有する装置、とりわけ高周波マイクロスイッチ
Document Type and Number:
Japanese Patent JP2004516778
Kind Code:
A
Abstract:
A capacitor with alterable capacitance for changing the impedance of a section of a coplanar waveguide, which may be used in particular as a high-frequency microswitch, is provided. A ground lead and a signal lead interrupted by an electroconductive connection which is self-supporting at least in some areas are provided, the capacitor including the electroconductive connection and an additional electroconductive connection connected to the ground lead. A structure connected to the electroconductive connection is provided, which is designed in such a manner that it reduces mechanical stresses which occurs in the electroconductive connection. An exemplary embodiment of the device provides for the electroconductive connection to be made of a material having coefficients of thermal expansion similar to that of silicon and a high modulus of elasticity compared to metals, in particular of molybdenum, tantalum or tungsten. The two exemplary embodiments may be combined.
Inventors:
Laurent Muller-Fiedler
Thomas walter
Marx Ulm
Thomas walter
Marx Ulm
Application Number:
JP2002554911A
Publication Date:
June 03, 2004
Filing Date:
December 13, 2001
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
H01H59/00; H01P1/12; H01P3/02; (IPC1-7): H01P1/12; H01P3/02
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel