Title:
伸張性コーティングを有するマイクロメカニカルフローセンサ
Document Type and Number:
Japanese Patent JP2004518119
Kind Code:
A
Abstract:
A sensor integrated on a semiconductor device (1), in particular a flow sensor, comprises a measuring element (2) on a membrane (5). In order to prevent a buckling of the membrane (5) a tensile coating (9) is applied. The coating covers the membrane, but it preferably leaves all the active electronic components integrated on the semiconductor chip (1) uncovered, such that their electrical properties are not affected.
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Inventors:
Stainer Fanha, Ralph
Tommaso, Francesco Sirrento
Tommaso, Francesco Sirrento
Application Number:
JP2002556576A
Publication Date:
June 17, 2004
Filing Date:
December 20, 2001
Export Citation:
Assignee:
Zenzilion Actien Gezel Shaft
International Classes:
G01F1/692; B81B3/00; G01F1/684; G01F15/10; H01L29/84; (IPC1-7): G01F1/692; B81B3/00; H01L29/84
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto