Title:
チタンをベースとした混合金属材料及びジルコニウムをベースとした混合金属材料;並びにスパッタリングターゲットを形成する方法
Document Type and Number:
Japanese Patent JP2004518814
Kind Code:
A
Abstract:
The invention encompasses methods of forming titanium-based mixed-metal materials and zirconium-based mixed-metal materials utilizing one or more of a reduction process, electrolysis process and iodide process. The invention also encompasses a sputtering target comprising zirconium and one or more elements selected from the group consisting of Al, B, Ba, Be, Ca, Ce, Co, Cs, Dy, Er, Fe, Gd, Hf, Ho, La, Mg, Mn, Mo, Nb, Nd, Ni, Pr, Sc, Sm, Sr, Ta, Ti, V, W, Y, and Yb. The invention also encompasses a sputtering target comprising titanium and boron.
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Inventors:
Turner, Stephen Pea
Green, joseph y
Skag Line, Rodney El
Koo, Yun
Green, joseph y
Skag Line, Rodney El
Koo, Yun
Application Number:
JP2002561099A
Publication Date:
June 24, 2004
Filing Date:
October 17, 2001
Export Citation:
Assignee:
Honeywell International Inc.
International Classes:
C22B5/12; C22B34/12; C22B34/14; C22C14/00; C22C16/00; C23C14/34; C25C3/26; C22B5/04; (IPC1-7): C22B5/04; C22B5/12; C22B34/12; C22B34/14; C22C14/00; C22C16/00; C23C14/34; C25C3/26
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shurin Sakurai
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shurin Sakurai