Title:
流体マウント
Document Type and Number:
Japanese Patent JP2004525315
Kind Code:
A
Abstract:
A fluid mount (10) for an exposure apparatus (32) includes a first subsystem (12) and a second subsystem (14). The first subsystem (12) includes a first cylinder (18) and a first piston (20). The first piston (20) moves within the first cylinder (18) along a first axis (26). The second subsystem (14) includes a second cylinder (22) and a second piston (24). The second piston (24) moves within the second cylinder (22) along a second axis (28). Importantly, (i) the second subsystem (14) is stacked on top of the first subsystem (12), (ii) the second axis (28) is substantially coaxial with the first axis (26), and (iii) the first piston (20) is connected to the second piston (24) with a piston connector (16). The resulting fluid mount (10) has a relatively high load carrying capacity and a relatively small footprint.
Inventors:
Michael binard
Douglas Sea Watson
Douglas Sea Watson
Application Number:
JP2002575503A
Publication Date:
August 19, 2004
Filing Date:
March 26, 2002
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F9/00; F16F9/18; F16F9/26; F16F9/36; F16F9/46; F16F9/50; F16F15/02; F16F15/023; G03F7/20; H01L21/027; (IPC1-7): F16F15/023; F16F9/26; F16F9/50; F16F15/02; G03F9/00; H01L21/027
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi