Title:
走査型近接場光学顕微鏡
Document Type and Number:
Japanese Patent JP2004529326
Kind Code:
A
Abstract:
A scanning near-field optical microscope detects the evanescent field formed about an illuminated sample (14) via an interaction between the field and a local probe (20). The probe (20) is scanned across the sample surface in order to collect a complete image as a succession of scan lines. In the microscope of this invention, image collection is more rapidly performed by translating the probe (20) whilst it is oscillated at or near its resonance frequency. In this way a series of scan lines covering an area of the sample surface are rapidly collected, the length of each scan line being determined by oscillation amplitude.
Inventors:
Miles, Marvin John
Humphris, Andrew David Lover
Hobbes, Jamie Kane
Humphris, Andrew David Lover
Hobbes, Jamie Kane
Application Number:
JP2002563054A
Publication Date:
September 24, 2004
Filing Date:
February 06, 2002
Export Citation:
Assignee:
University of Bristol
International Classes:
G01B9/04; G01Q60/18; G01B11/30; (IPC1-7): G01N13/14; G01B11/30
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Toru Miyamae
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Toru Miyamae