Title:
質量流量コントローラのシステムおよび方法
Document Type and Number:
Japanese Patent JP2004533049
Kind Code:
A
Abstract:
A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
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Inventors:
Lulu, John M
Wang, Chun
Valentine, william s
Saggio, Joseph A., Junior
Wang, Chun
Valentine, william s
Saggio, Joseph A., Junior
Application Number:
JP2002584094A
Publication Date:
October 28, 2004
Filing Date:
April 24, 2002
Export Citation:
Assignee:
Unit Instruments Incorporated
International Classes:
G01F1/00; G01F25/00; G05B5/01; G05B11/36; G05B13/04; G05D7/06; (IPC1-7): G05B11/36; G01F1/00
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Yoshio Akimoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Yoshio Akimoto
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