Title:
ロードロック用高速交換2重化基板移送
Document Type and Number:
Japanese Patent JP2004535671
Kind Code:
A
Abstract:
A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber without the need for a central transport robot. The load lock transport is a dual element robot designed for minimum clearance and space and operates within a matching load lock chamber of minimum volume.
Inventors:
Talmer Mark A
Application Number:
JP2003511282A
Publication Date:
November 25, 2004
Filing Date:
June 26, 2002
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
B65G49/07; H01L21/205; H01L21/3065; H01L21/677; (IPC1-7): H01L21/68; B65G49/07; H01L21/205; H01L21/3065
Attorney, Agent or Firm:
Motohiko Fujimura
Tsuneyuki Kitajima
Shigeyuki Nagaoka
Tsuneyuki Kitajima
Shigeyuki Nagaoka