Title:
ニッケル-チタン合金スパッタターゲットとその製造法
Document Type and Number:
Japanese Patent JP2005500434
Kind Code:
A
Abstract:
The sputter target deposits nickel from a binary alloy. The binary alloy contains, by weight percent, 9 to 15 titanium and the balance nickel and incidental impurities. The binary alloy has, by weight percent, 35 to 50 TiNi3 needle-like intermetallic phase and balance alpha-nickel phase. The TiNi3 needle-like intermetallic phase and alpha-nickel phase are formed from a eutectic decomposition. The alpha-nickel phase has a grain size between 50 and 180 mum. The binary alloy has a Curie temperature of less than or equal to a temperature of 25° C. and exhibits paramagnetic properties at temperatures of 25° C. or lower.
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Inventors:
Holger Jay Kenigsman
Paul S. Gilman
Thomas Jay Hunt
Paul S. Gilman
Thomas Jay Hunt
Application Number:
JP2002585686A
Publication Date:
January 06, 2005
Filing Date:
April 05, 2002
Export Citation:
Assignee:
Praxair ST Technology Incorporated
International Classes:
C22F1/10; C22C19/03; C22F1/00; C23C14/34; H01L21/285; (IPC1-7): C23C14/34; C22C19/03; C22F1/10; H01L21/285
Attorney, Agent or Firm:
Motohiro Kurauchi
Hiroshi Kazama
Hiroshi Kazama