Title:
原子価補償されたAg含有錯体を有するジルコンチタン酸鉛(PZT)を基礎とする圧電セラミック材料
Document Type and Number:
Japanese Patent JP2005503992
Kind Code:
A
Abstract:
The characteristics of piezoceramic multilayer actuators based on lead-zirconate-titanate are determined to a great extent by the compatibility of PZT ceramics having a low sintering temperature with the AgPd internal metallisation during cofiring. It is important to take into consideration that Ag ions in PZT modifications have a high diffusivity at high temperatures (>800° C.) and in addition act as acceptor doping when integrated into the PZT system. The reduction of the fraction of the precious metal palladium, which prevents diffusion, is limited, as silver increasingly diffuses into the piezoceramic as the silver fraction in the internal electrodes increases. According to the invention, Ag+ ions are used to form valence-compensated compositions of the PZT system. A higher level of deformation is maintained, i.e. the acceptor-donor effect in the system is very similar to that of the PZT system modified conventionally without internal electrodes.
Inventors:
Gunther Herke
Application Number:
JP2003532421A
Publication Date:
February 10, 2005
Filing Date:
September 26, 2002
Export Citation:
Assignee:
CeramTec AG Innovative Ceramic Engineering
International Classes:
C04B35/49; C04B35/491; C04B35/493; H01L41/187; H01L41/083; (IPC1-7): C04B35/49; H01L41/187
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel