Title:
ハイブリッドMEMS製造方法及び新規な光MEMSデバイス
Document Type and Number:
Japanese Patent JP2005504648
Kind Code:
A
Abstract:
A new hybrid method of fabricating optical micro electro mechanical system (MEMS) devices is disclosed that uses both bulk and surface micromachining techniques, and a new optical MEMS device is also disclosed that is fabricated using the new method. The method includes the step of mounting a handle layer to one or more layers of MEMS structural material. Layers of structural and sacrificial material are then built up on the MEMS structural material using surface micromachining techniques. Drive electronics are mounted to the layers of structural and sacrificial material. The handle layer is removed to reveal the MEMS structural layer and the sacrificial material within the various layers is dissolved. The new method is particularly applicable to fabricating optical MEMS devices, with the handle layer being adjacent to a Si mirror layer. The surface micomachining layers form electrode and spring structures. Drive electronics are then mounted on the layers of structural material, so that a bias can be applied to the MEMS structures. The handle layer is removed from the mirror layer to reveal the mirror's reflective surface, and the sacrificial material is dissolved away, freeing the MEMS structures to operate. For optical or other MEMS arrays, a linking framework can be included to attach the MEMS devices.
Inventors:
De Natale, Jeffrey Ef
Application Number:
JP2003534312A
Publication Date:
February 17, 2005
Filing Date:
July 17, 2002
Export Citation:
Assignee:
Rockwell Scientific Licensing LRC
International Classes:
B81B3/00; B81C1/00; G02B6/35; G02B26/08; (IPC1-7): B81C1/00; B81B3/00; G02B26/08
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Otsuka Naruhiko
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Otsuka Naruhiko