Title:
干渉周期誤差の補償
Document Type and Number:
Japanese Patent JP2005509147
Kind Code:
A
Abstract:
The invention features an interferometry method including: directing two beams derived from a common source along different paths; producing a first output beam derived from a first portion of each of the two beams; producing a second output beam derived from a second portion of each of the two beams; and calculating a product of a first signal derived from the first output beam and a second signal derived from the second output beam.
Inventors:
Hill, Henry A.
Application Number:
JP2003542859A
Publication Date:
April 07, 2005
Filing Date:
November 05, 2002
Export Citation:
Assignee:
ZYGO CORPORATION
International Classes:
G01B9/02; G01B11/00; G03F7/20; H01L21/027; (IPC1-7): G01B9/02; G01B11/00; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda