Title:
抵抗炉
Document Type and Number:
Japanese Patent JP2005515399
Kind Code:
A
Abstract:
A resistance furnace has a tubular heating element with a vertically-oriented longitudinal axis. The heating element has a shell surface defined by an upper side and a lower side and surrounding a furnace chamber. The heating element is connected to at least two supply terminals by which heating current is introduced at power supply points into the heating element. The supply terminals include a surrounding upper annular collar adjacent the upper side of the shell surface, and also a surrounding lower annular collar adjacent the lower side of the shell surface.
Inventors:
Thomas Bogdan
Olifa gantz
Olifa gantz
Application Number:
JP2003562552A
Publication Date:
May 26, 2005
Filing Date:
January 24, 2002
Export Citation:
Assignee:
HERAEUS TENEVO AG
International Classes:
F27B17/00; H05B3/02; F27D11/02; F27D21/00; H01L21/00; H05B3/62; F27B9/28; F27D7/02; F27D7/06; F27D9/00; F27D19/00; F27D99/00; (IPC1-7): F27B17/00; F27D11/02; H05B3/02
Attorney, Agent or Firm:
Shoji Ishihara