サブ波長スケールの異常性を検出する波問い合わせ近接場アレイ・システムおよび方法

Title:

サブ波長スケールの異常性を検出する波問い合わせ近接場アレイ・システムおよび方法

Document Type and Number:

Japanese Patent JP2005520168

Kind Code:

A

Abstract:

An array of antenna elements ( 20 ) can be used to detect subwavelength sized anomalies on a surface below the array. An array ( 20 ) is illuminated at optical frequencies by a coherent optical energy source ( 26 ). The change in reactance and radiated power of the antenna elements that results from the proximity of the anomaly to the near field of the antenna element's open-circuited is detected and holographically filtered to eliminate the radiation caused by the antenna array itself. Image processing is performed on the detected scattered radiation ( 100 ) to determine whether an anomaly is present and to locate the anomaly and its characteristics.

Inventors:

Diaz, Rodolfo, Yi.
Watts, Michael

Application Number:

JP2003579310A

Publication Date:

July 07, 2005

Filing Date:

March 05, 2003

Export Citation:

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Assignee:

Arizona Board of Regents

International Classes:

G01B11/30; G01N21/47; G01N21/94; G01N21/95; G01N21/958; H01L21/66; (IPC1-7): G01N21/958; G01B11/30; H01L21/66

Attorney, Agent or Firm:

Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe

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