補強された化学機械平坦化用ベルト

Title:

補強された化学機械平坦化用ベルト

Document Type and Number:

Japanese Patent JP2005520335

Kind Code:

A

Abstract:

A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt.

Inventors:

Lynn Jibing
Heim's Diane Jay.

Application Number:

JP2003576832A

Publication Date:

July 07, 2005

Filing Date:

March 10, 2003

Export Citation:

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Assignee:

LAM RESEARCH CORPORATION

International Classes:

B24B37/013; B24B37/20; B24D11/00; B29D29/00; H01L21/304; (IPC1-7): H01L21/304; B24B37/00

Attorney, Agent or Firm:

Meisei International Patent Office

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