Title:
湿った環境中の走査型電子顕微鏡のための低圧チャンバー
Document Type and Number:
Japanese Patent JP2005529340
Kind Code:
A
Abstract:
A specimen enclosure assembly ( 100 ) for use in an electron microscope and including a rigid specimen enclosure dish ( 102 ) having an aperture ( 122 ) and defining an enclosed specimen placement volume ( 125 ), an electron beam permeable, fluid impermeable, cover ( 114 ) sealing the specimen placement volume ( 125 ) at the aperture ( 122 ) from a volume outside the enclosure and a pressure controller communicating with the enclosed specimen placement volume ( 125 ) and being operative to maintain the enclosed specimen placement volume ( 125 ) at a pressure, which exceeds a vapor pressure of a liquid sample ( 123 ) in the specimen placement volume ( 125 ) and is greater than a pressure of a volume outside the enclosure, whereby a pressure differential across the cover ( 114 ) does not exceed a threshold level at which rupture of the cover ( 114 ) would occur.
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Inventors:
Moses, Elisha
Sivage, Stephan
Sivage, Stephan
Application Number:
JP2004511866A
Publication Date:
September 29, 2005
Filing Date:
June 01, 2003
Export Citation:
Assignee:
Yeda Research and Development Company Limited
International Classes:
G01N23/00; G01N23/225; G21K7/00; H01J37/00; H01J37/20; H01J37/252; H01J37/26; G02B; (IPC1-7): G01N23/225; H01J37/20
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Toru Miyamae
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Toru Miyamae