Title:
処理チャンバ内の圧力の制御装置及びその作動方法
Document Type and Number:
Japanese Patent JP2005530094
Kind Code:
A
Abstract:
A method of operating apparatus for controlling the pressure in a process chamber (10), the apparatus comprising a first pump unit (14) having an inlet in fluid connection with an outlet of said process chamber, and a second pump unit (16) having an inlet in fluid connection with an outlet of the first pump unit via a flow control unit (18) comprising a variable flow control device (20; 28) having variable conductance for controlling outlet fluid pressure at the outlet of the first pump unit, the method comprises controlling speed of the first pump unit to increase the range of chamber pressures over which control of the outlet fluid pressure produces changes in said chamber pressure without exceeding the thermal limit and/or motor stall limit of the first pump unit.
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Inventors:
Torner Martin Ernest
Application Number:
JP2004515050A
Publication Date:
October 06, 2005
Filing Date:
June 20, 2003
Export Citation:
Assignee:
The BOC Group plc
International Classes:
F04D19/04; F04D25/00; F04D25/16; G05D16/20; H01L21/3065; F04C18/02; F04C23/00; (IPC1-7): F04D19/04; F04D25/16; H01L21/3065
Domestic Patent References:
| JP2002147365A | 2002-05-22 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Village shrine Atsuo
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Village shrine Atsuo
Disciple Maru Ken
Ino Sato