Title:
熱処理チャンバ内で温度測定装置を較正するシステムおよび方法
Document Type and Number:
Japanese Patent JP2005530997
Kind Code:
A
Abstract:
A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.
Inventors:
Paul Janice Timmans
Application Number:
JP2004515730A
Publication Date:
October 13, 2005
Filing Date:
June 03, 2003
Export Citation:
Assignee:
Mattson Technology Incorporated
International Classes:
G01J5/58; G01J5/00; G01J5/08; G01J5/52; G06F19/00; H01L21/00; H01L21/26; H01L21/324; H01L21/66; G01J5/06; (IPC1-7): G01J5/58; G01J5/00; H01L21/26
Attorney, Agent or Firm:
Yoshikazu Tani
Kazuo Abe
Kazuo Abe