反射屈折縮小対物レンズ

Title:

反射屈折縮小対物レンズ

Document Type and Number:

Japanese Patent JP2005531021

Kind Code:

A

Inventors:

Bill kit mecking
Olaf Ditman
Tralf Gruner
Hradimir Kamenov
Martin Brunotte

Application Number:

JP2004514856A

Publication Date:

October 13, 2005

Filing Date:

June 25, 2003

Export Citation:

Assignee:

Carl Zeiss SMT AG

International Classes:

G02B13/24; G02B13/14; G02B17/08; G03F7/20; H01L21/027; (IPC1-7): G02B13/24; G02B13/14; G02B17/08; H01L21/027

Attorney, Agent or Firm:

Toru Tanabe

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