Title:
熱陰極電離真空計のための圧力制御脱ガスシステム
Document Type and Number:
Japanese Patent JP2005534032
Kind Code:
A
Abstract:
A method for operating a hot cathode ionization pressure gauge during electron bombardment and resistance degas operations by controlling the degas power levels as a function of the gauge pressure. In one embodiment, the degas power level is increased and decreased in steps, and the gauge pressure monitored following each increase and decrease. In another embodiment the rate of change in the gauge pressure is monitored while the degas power level is increased. If it is determined from the monitored rate of change that the gauge pressure may exceed the upper pressure limit, the degas power increases can be stopped or the degas power decreased. These operations are continued until predetermined final degas conditions are met. A display can be activated following the successful completion of the degas operation.
Inventors:
Peacock, flannel, tea.
Wade, Stacy, Double You.
Wade, Stacy, Double You.
Application Number:
JP2004524778A
Publication Date:
November 10, 2005
Filing Date:
July 25, 2003
Export Citation:
Assignee:
MKS INSTRUMENTS,INC.
International Classes:
G01L21/32; (IPC1-7): G01L21/32
Domestic Patent References:
| JPH06150875A | 1994-05-31 | |||
| JPH1183661A | 1999-03-26 | |||
| JPH11111205A | 1999-04-23 | |||
| JP2002091629A | 2002-03-29 | |||
| JPH0524539A | 1993-02-02 | |||
| JPH0777473A | 1995-03-20 | |||
| JP2002025497A | 2002-01-25 |
Attorney, Agent or Firm:
Shinichi Ogawa
Takashi Noguchi
Kazuhiko Saishita
Takashi Noguchi
Kazuhiko Saishita