Title:
薄層の局所的な堆積によって機能化された表面を備えた微細構造及びその製造方法
Document Type and Number:
Japanese Patent JP2005536365
Kind Code:
A
Abstract:
An electromechanical structure (1) incorporating a first mechanical part (102) made of a first conductive material and which includes an elastically deformable area (104) having a given thickness with an exposed surface (2) and a first organic film (4) with a given thickness, which is deposited over the entire exposed surface of the deformable area. The thickness of this first film is such that the elastic response of the deformable area including the first film does not change by more than 5% in relation to the response of the bare deformable area or the first film is ten times smaller than the thickness of the deformable area. Independent claims are also included for: (a) a pressure sensor incorporating an electromechanical microstructure; (b) a platelet incorporating an assembly of microstructures; (c) a microsystem incorporating an electromechanical microstructure.
Inventors:
Christoph Brew
Christoph Kergery
Francois Percho
Christoph Kergery
Francois Percho
Application Number:
JP2004530314A
Publication Date:
December 02, 2005
Filing Date:
August 25, 2003
Export Citation:
Assignee:
Alcimer S.A.
Tronics microsystems
Tronics microsystems
International Classes:
A61B5/00; B81B3/00; G01L9/00; (IPC1-7): B81B3/00
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro