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Patent Searching and Data


Document Type and Number:
Japanese Patent JP2006350307
Kind Code:
A5
Application Number:
JP2006131834
Publication Date:
September 29, 2011
Export Citation:
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International Classes:
G03F7/031; H01L21/28; C23C18/20; C23C18/30; H01L21/3205; G03F7/004; G03F7/40; C08F292/00