Title:
二次元的に拡大化された基板を真空処理するための装置および同基板の製造方法
Document Type and Number:
Japanese Patent JP2006506818
Kind Code:
A
Abstract:
A vacuum transport chamber has a transport robot arrangement. A processing arrangement has at least one processing station communicating by at least one workpiece pass-through opening with the vacuum transport chamber. A loadlock arrangement communicates by at least one workpiece pass-through opening with an atmosphere outside the vacuum transport chamber and the processing arrangement. One single loadlock and processing tower is formed by the processing arrangement and the loadlock arrangement being arranged vertically on upon the other.
Inventors:
Austerman, liner
Buchel, Artur
Eliya Kubi, Mustafa
Buchel, Artur
Eliya Kubi, Mustafa
Application Number:
JP2004552336A
Publication Date:
February 23, 2006
Filing Date:
November 12, 2003
Export Citation:
Assignee:
Unakis Balzers Akchengezel Shaft
International Classes:
H01L21/677; B65G1/00; C23C14/56; C23C16/54; F27B17/00; F27D3/00; F27D3/06; H01L21/00; H01L21/205
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai