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Title:
クリーンルーム内の容器を閉じる高圧装置
Document Type and Number:
Japanese Patent JP2006508307
Kind Code:
A
Abstract:
The invention relates to a very compact device and to a method for closing a container by means of a rotational symmetric lifting system, which contains a working piston and a guide cylinder and is operated essentially using the same fluid that is placed inside the container while serving a process medium. The front face of the working piston forms, at least in part, the closure part of the container or is joined to the closure part in a fixed manner. Ideally, a supercritical fluid is used both as a working medium for driving the piston and as the process medium.

Inventors:
Rutge Christoph
Kurz Hans-Otmer
Application Number:
JP2004554203A
Publication Date:
March 09, 2006
Filing Date:
November 13, 2003
Export Citation:
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Assignee:
Ude High Pressure Technologies Gesellschaft Mito Beschlenktel Haftung
International Classes:
F15B15/14; B08B7/00; H01L21/00
Domestic Patent References:
JPS6317455U1988-02-05
JPH01204427A1989-08-17
JPS6445131A1989-02-17
JPH03261128A1991-11-21
JPH0298928A1990-04-11
JPH0225447A1990-01-26
JPH01238589A1989-09-22
JPH03285658A1991-12-16
JPH0331293A1991-02-12
JPH01254660A1989-10-11
JPH08181050A1996-07-12
JPS58157005U1983-10-20
JPH03135402A1991-06-10
JPH03123604A1991-05-27
JPH06502844A1994-03-31
JPH04505775A1992-10-08
JPH03127832A1991-05-30
JPH06502495A1994-03-17
JPH02111478A1990-04-24
JPH03503975A1991-09-05
JPH03174330A1991-07-29
JPH01294516A1989-11-28
JP2002327712A2002-11-15
JPH02292216A1990-12-03
JPS5838010U1983-03-12
JPH0367704U1991-07-02
JPH0351576A1991-03-05
JPS61119874A1986-06-07
JPH01170026A1989-07-05
JPH02238887A1990-09-21
JPH0417333A1992-01-22
Foreign References:
WO2002084709A22002-10-24
Attorney, Agent or Firm:
Mitsufumi Esaki
Tsuneo Mihara
Okumura Yoshimichi
Blacksmith



 
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