Title:
光学的検査のための照明システム
Document Type and Number:
Japanese Patent JP2006515668
Kind Code:
A
Abstract:
Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
Inventors:
Naphtali, Ron
Getter, aviche
Feldman, Heim
Shoham, Delon
Bry, Jill
Getter, aviche
Feldman, Heim
Shoham, Delon
Bry, Jill
Application Number:
JP2004541513A
Publication Date:
June 01, 2006
Filing Date:
September 08, 2003
Export Citation:
Assignee:
Applied Materials Israel Limited
International Classes:
G01N21/84; G01N21/47; G01N21/88; G01N21/95; G01N21/956; G02B27/48
Domestic Patent References:
| JP2000275182A | 2000-10-06 | |||
| JPH11223795A | 1999-08-17 | |||
| JPH09214023A | 1997-08-15 | |||
| JP2004531735A | 2004-10-14 | |||
| JPH07270328A | 1995-10-20 | |||
| JPS62235510A | 1987-10-15 | |||
| JP2002039960A | 2002-02-06 | |||
| JPH11326826A | 1999-11-26 | |||
| JP2000111832A | 2000-04-21 | |||
| JP2002541526A | 2002-12-03 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Masakazu Noda
Yuichi Yamada
Masakazu Noda