Title:
高性能カタディオプトリックイメージングシステム
Document Type and Number:
Japanese Patent JP2006518876
Kind Code:
A
Abstract:
A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy, at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
Inventors:
Schaefer David Earl
Chang Yun-ho
Armstrong Jay Joseph
Chang Yun-ho
Armstrong Jay Joseph
Application Number:
JP2006503735A
Publication Date:
August 17, 2006
Filing Date:
February 20, 2004
Export Citation:
Assignee:
KL Tencor Technologies Corporation
International Classes:
G02B17/08; G02B21/02; G03F7/20; H01L21/027
Domestic Patent References:
| JPH10177139A | 1998-06-30 | |||
| JP2001517806A | 2001-10-09 | |||
| JP2003504687A | 2003-02-04 |
Foreign References:
| WO2000039623A1 | 2000-07-06 |
Attorney, Agent or Firm:
Kenji Yoshida
Jun Ishida
Jun Ishida