Title:
真空プラズマ処理された加工物を製造する方法および加工物を真空プラズマ処理するためのシステム
Document Type and Number:
Japanese Patent JP2007500783
Kind Code:
A
Abstract:
A method of manufacturing vacuum plasma treated workpieces includes the steps of introducing at least one workpiece to be treated into a vacuum chamber; treating the workpiece in the vacuum chamber, thereby establishing a plasma discharge in the vacuum chamber by a supply signal with maximum energy at a first frequency which is at least in the Hf frequency range; removing the workpiece treated from the vacuum chamber; performing a cleaning inside the vacuum chamber, thereby establishing the plasma discharge by a supply signal with maximum energy at a second frequency higher than the Hf frequency; and repeating these steps at least one time.
Inventors:
El Yakubi, Mustafa
Ann, Fannara
Osterman, liner
Neubeck, Claus
Riu, Benoa
Ann, Fannara
Osterman, liner
Neubeck, Claus
Riu, Benoa
Application Number:
JP2006521364A
Publication Date:
January 18, 2007
Filing Date:
July 26, 2004
Export Citation:
Assignee:
Unakis Balzers Akchengezel Shaft
International Classes:
C23C16/44; C23C16/24; C23C16/505; C23C16/54; C23F1/00; H01J37/32; H01L21/3065; H01L21/31; H05H1/24; H05H1/46
Domestic Patent References:
| JPH05315098A | 1993-11-26 | |||
| JPH06242624A | 1994-09-02 | |||
| JPH108259A | 1998-01-13 | |||
| JPH0661219A | 1994-03-04 | |||
| JP2002367977A | 2002-12-20 |
Foreign References:
| WO2001097266A1 | 2001-12-20 | |||
| US5418019A | 1995-05-23 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai