Title:
高温拡散炉の加熱コイルの保持メカニズム
Document Type and Number:
Japanese Patent JP2007502549
Kind Code:
A
Abstract:
A heating assembly for use in an electric furnace includes a helical heating element encircled by thermal insulation, and rows of spacers for keeping turns of the heating element spaced apart by predetermined distances. Each spacer includes circumferential side portions facing generally in a circumferential direction of the heating element and converging toward a center region of the spacer to form a radial undercut against which the insulation abuts. The spacers of each row have through holes extending parallel to a longitudinal axis of the heating element. A guide rod extends through the through holes of each row of spacers.
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Inventors:
Peck, Kevin Bee.
Application Number:
JP2006533357A
Publication Date:
February 08, 2007
Filing Date:
May 24, 2004
Export Citation:
Assignee:
MRL Industries
International Classes:
H01L21/22; F27B17/00; F27D11/00; H01L21/00; H05B3/66
Domestic Patent References:
| JPH0474299U | 1992-06-29 | |||
| JPH05504227A | 1993-07-01 | |||
| JPS63145291U | 1988-09-26 | |||
| JPS4318235Y1 | ||||
| JPS63145291U | 1988-09-26 | |||
| JPS6460988A | 1989-03-08 | |||
| JPS4424638Y1 | ||||
| JPH05504227A | 1993-07-01 | |||
| JPS63202097U | 1988-12-27 | |||
| JPS5623675Y2 | 1981-06-03 | |||
| JPH11102874A | 1999-04-13 | |||
| JPH0758046A | 1995-03-03 | |||
| JPS62170186A | 1987-07-27 |
Foreign References:
| US5536919A | 1996-07-16 |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tetsuro Shimada
Kurachi Yasuyuki
Shimichi Akihisa
Masaya Nishiyama
Jun Tsuruta
Tetsuro Shimada
Kurachi Yasuyuki
Shimichi Akihisa
Masaya Nishiyama