Title:
透過型の空間ヘテロダイン干渉法(SHIFT)測定
Document Type and Number:
Japanese Patent JP2007504494
Kind Code:
A
Abstract:
Systems and methods are described for spatial-heterodyne interferometry for reflection and transmission (SHIRT) measurements. A method includes digitally recording a first spatiallyheterodyned hologram using a first reference beam and a first object beam; digitally recording a second spatially-heterodyned hologram using a second reference beam and a second object beam; Fourier analyzing the digitally recorded first spatially-heterodyned hologram to define a first analyzed image; Fourier analyzing the digitally recorded second spatially-heterodyned hologram to define a second analyzed image; digitally filtering the first analyzed image to define a first result; and digitally filtering the second analyzed image to define a second result; performing a first inverse Fourier transform on the first result, and performing a second inverse Fourier transform on the second result. The first object beam is transmitted through an object (940, 1045) that is at least partially translucent, and the second object beam is reflected from the object.
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Inventors:
Hanson, Gregory Earl.
Bingham, Philip Earl.
Tobin, Ken W.
Bingham, Philip Earl.
Tobin, Ken W.
Application Number:
JP2006524850A
Publication Date:
March 01, 2007
Filing Date:
August 26, 2004
Export Citation:
Assignee:
Utility-Batelle, LRC
International Classes:
G03H1/16; G01B11/06; G01N21/27
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita