Title:
応力がかかった薄膜島
Document Type and Number:
Japanese Patent JP2007506549
Kind Code:
A
Abstract:
A structure including a support defining an opening, and a tensilely stressed thin-film membrane disposed to occlude the opening, the membrane contacting at least a portion of the support. The stressed membrane includes a material having a characteristic crack spacing greater than one-half of a minimum dimension of the membrane and less than ten times the minimum dimension. A structure including a support defining a opening having a minimum opening dimension, and a compressively stressed thin-film membrane disposed to occlude the opening, the membrane contacting at least a portion of the support. The stressed membrane includes a membrane material having a critical aspect ratio for buckling that is greater than a ratio of one-half of the minimum opening dimension to a thickness of the membrane, and the critical aspect ratio for buckling is less than a ratio of ten times the minimum opening dimension to the thickness of the membrane.
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Inventors:
Schavits, Samuel, Bee.
Franz, Alexander
Burton, Roger, W.
Franz, Alexander
Burton, Roger, W.
Application Number:
JP2006528173A
Publication Date:
March 22, 2007
Filing Date:
September 23, 2004
Export Citation:
Assignee:
LILLIPUTIAN SYSTEMS, INC.
International Classes:
B01D69/10; B01D39/00; B01D67/00; B01D69/02; B01D71/02; C01B3/50; C01B3/56; H01M8/02; H01M8/12; H01M8/24
Domestic Patent References:
| JP2002526239A | 2002-08-20 | |||
| JP2002222659A | 2002-08-09 | |||
| JP2002352816A | 2002-12-06 | |||
| JPH1173978A | 1999-03-16 | |||
| JPH087900A | 1996-01-12 | |||
| JP2002222659A | 2002-08-09 | |||
| JP2002352816A | 2002-12-06 | |||
| JPH1173978A | 1999-03-16 | |||
| JPH087900A | 1996-01-12 | |||
| JP2002526239A | 2002-08-20 |
Attorney, Agent or Firm:
Mizuno Yuuki
Junji Endo
Junji Endo