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Title:
応力がかかった薄膜島
Document Type and Number:
Japanese Patent JP2007506549
Kind Code:
A
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Inventors:
Schavits, Samuel, Bee.
Franz, Alexander
Burton, Roger, W.
Application Number:
JP2006528173A
Publication Date:
March 22, 2007
Filing Date:
September 23, 2004
Export Citation:
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Assignee:
LILLIPUTIAN SYSTEMS, INC.
International Classes:
B01D69/10; B01D39/00; B01D67/00; B01D69/02; B01D71/02; C01B3/50; C01B3/56; H01M8/02; H01M8/12; H01M8/24
Domestic Patent References:
JP2002526239A2002-08-20
JP2002222659A2002-08-09
JP2002352816A2002-12-06
JPH1173978A1999-03-16
JPH087900A1996-01-12
JP2002222659A2002-08-09
JP2002352816A2002-12-06
JPH1173978A1999-03-16
JPH087900A1996-01-12
JP2002526239A2002-08-20
Attorney, Agent or Firm:
Mizuno Yuuki
Junji Endo



 
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