Title:
制御可能な通過帯域幅を有する減結合スタック型バルク音響共振器の帯域フィルタ
Document Type and Number:
Japanese Patent JP2007510383
Kind Code:
A
Abstract:
The temperature-compensated film bulk acoustic resonator (FBAR) device comprises an FBAR stack. The FBAR stack comprises an FBAR and a temperature-compensating element. The FBAR is characterized by a resonant frequency having a temperature coefficient, and comprises opposed planar electrodes and a piezoelectric element between the electrodes. The piezoelectric element has a temperature coefficient on which the temperature coefficient of the resonant frequency depends at least in part. The temperature-compensating element has a temperature coefficient opposite in sign to the temperature coefficient of the piezoelectric element.
Inventors:
Larson, The Third, John, Dee
Ellis, Stephane, Elle
Ellis, Stephane, Elle
Application Number:
JP2006538364A
Publication Date:
April 19, 2007
Filing Date:
October 29, 2004
Export Citation:
Assignee:
Avago Technologies General IP (Singapore) Private Limited
International Classes:
H03H9/54; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H03H3/02; H03H9/02; H03H9/13; H03H9/17; H03H9/58; H03H9/60
Domestic Patent References:
| JP2005512442A | 2005-04-28 | |||
| JP2003505905A | 2003-02-12 |
Foreign References:
| WO2003050950A1 | 2003-06-19 |
Attorney, Agent or Firm:
Satoshi Furuya
Takahiko Mizobe
Kiyoharu Nishiyama
Takahiko Mizobe
Kiyoharu Nishiyama