Title:
電気力学的マイクロミラー素子およびその製造方法
Document Type and Number:
Japanese Patent JP2007510954
Kind Code:
A
Abstract:
An image display system includes an improved hinge for a micro-mirror device composed of a conductive-doped semiconductor and immune to plastic deformation at typical to extreme temperatures. The hinge is directly connected to the micro-mirror device and facilitates the manufacturing of an optically flat micro-mirror. This eliminates Fraunhofer diffraction due to recesses on the reflective surface of the micro-mirror. In addition, the hinge is hidden from incoming light thus improving contrast and fill-factor. The image display system further includes signal transmission metal traces formed on areas between the doped semiconductor hinges. The signal transmission metal traces are formed either before or after a high temperature crystallization process is applied to the hinges.
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Inventors:
Goodbye
Application Number:
JP2006538296A
Publication Date:
April 26, 2007
Filing Date:
October 29, 2004
Export Citation:
Assignee:
Goodbye
International Classes:
G02B26/08; B81B3/00; B81B7/02; B81B7/04; B81C1/00; G02B26/10
Domestic Patent References:
| JP2004130507A | 2004-04-30 | |||
| JP2003075741A | 2003-03-12 | |||
| JP2002139679A | 2002-05-17 | |||
| JP2002525676A | 2002-08-13 |
Attorney, Agent or Firm:
Patent business corporation cluster