Title:
一体型絶対圧・差圧トランスデューサ
Document Type and Number:
Japanese Patent JP2007512535
Kind Code:
A
Abstract:
A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
Inventors:
Paul do Zoletz
You fan goo
Gary Holcomb
Ole Wenzel
You fan goo
Gary Holcomb
Ole Wenzel
Application Number:
JP2006541440A
Publication Date:
May 17, 2007
Filing Date:
November 24, 2004
Export Citation:
Assignee:
MKS INSTRUMENTS,INCORPORATED
International Classes:
G01L19/00; G01L13/00; G01L27/00
Domestic Patent References:
| JP2001215163A | 2001-08-10 | |||
| JPH09138170A | 1997-05-27 | |||
| JPS6046049U | 1985-04-01 | |||
| JP2001215163A | 2001-08-10 | |||
| JPH09138170A | 1997-05-27 | |||
| JPS6046049U | 1985-04-01 |
Foreign References:
| WO2001071781A2 | 2001-09-27 | |||
| WO2001071781A2 | 2001-09-27 |
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura