Title:
有用な層を分離する方法および前記方法によって得られるコンポーネント
Document Type and Number:
Japanese Patent JP2007525330
Kind Code:
A
Abstract:
Detachment of a useful layer (1), connected initially by a sacrificial layer (2) to a substrate (3), comprises the engraving, at least partially, of the sacrificial layer. Before engraving of the sacrificial layer at least part of the surface (4,5) of at least one of the layers (1, 3) in contact with the sacrificial layer are doped and after engraving of the sacrificial layer these surfaces are superficially engraved to augment the rugosity of the doped part of the surface. An independent claim is also included for a component comprising a suspended useful layer, fastened to a substrate and obtained.
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Inventors:
Hubert, Grande
Bernard, Dame
Bosson, Silvier, Biore
Michelle, Borel
Bernard, Dame
Bosson, Silvier, Biore
Michelle, Borel
Application Number:
JP2006518273A
Publication Date:
September 06, 2007
Filing Date:
July 01, 2004
Export Citation:
Assignee:
Comisaria, A, Renergy, Atomiku
International Classes:
B81C1/00; B81B3/00; C23F1/00; C23F1/24
Domestic Patent References:
| JP2002323513A | 2002-11-08 | |||
| JPH0798327A | 1995-04-11 | |||
| JPH07153973A | 1995-06-16 | |||
| JPH0936458A | 1997-02-07 |
Foreign References:
| US6004832A | 1999-12-21 |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki