Title:
プロセス品質標識を有する図的表現
Document Type and Number:
Japanese Patent JP2007531922
Kind Code:
A
Abstract:
A graphical user interface for enabling a user to graphically observe on a displaying mechanism a statistical measure of the process quality of a manufacturing process provides for the display of an icon representing a workpiece. The location and color of the icon on the displaying mechanism indicates the process quality of the manufacturing process for the represented workpiece.
Inventors:
Rev Ami Uzi
Schiffnatch Gunter
Atwood mark
Schiffnatch Gunter
Atwood mark
Application Number:
JP2006520244A
Publication Date:
November 08, 2007
Filing Date:
July 09, 2004
Export Citation:
Assignee:
MKS Instruments Incorporated
International Classes:
G05B23/02; G05B19/418; G06F19/00; H01L
Domestic Patent References:
| JPH09237810A | 1997-09-09 | |||
| JP2002024204A | 2002-01-25 | |||
| JPH08293533A | 1996-11-05 | |||
| JP2002190509A | 2002-07-05 | |||
| JPH11317431A | 1999-11-16 | |||
| JPH09246126A | 1997-09-19 | |||
| JP2001085491A | 2001-03-30 | |||
| JPS6435928A | 1989-02-07 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda