Title:
不連続なシリコン壁を含んだ、部分的に酸化された多孔性のシリコン
Document Type and Number:
Japanese Patent JP2007532926
Kind Code:
A
Abstract:
A device and method for producing a "biochip base module" for detecting biochemical reactions for the study of enzymatic reactions, nucleic acid hybridizations, protein-protein interactions and other binding reactions in the field of genome, proteome, or active-agent research. A flat macroporous support material having a multiplicity of 500 nm to 100 mum diameter pores distributed over at least one surface region and extending from one surface through to the opposite surface of the support material. The device has two or more regions having pores with SiO2 pore walls. These regions are each surrounded by a frame or box of walls with a silicon core arranged parallel to the longitudinal axes of the pores and is open towards the surfaces. The silicon core merges into silicon dioxide over the cross section towards the outer side of the walls forming the frame, and each individual frame is spatially isolated from the frames surrounding it.
Inventors:
Der Tinger, Stephan
Cruair, Marco
Cruair, Marco
Application Number:
JP2007508742A
Publication Date:
November 15, 2007
Filing Date:
March 07, 2005
Export Citation:
Assignee:
INTERNATIONAL BUSINESS MASCHINES CORPORATION
International Classes:
G01N33/551; B01L3/00; C12M1/00; C12N15/09; G01N33/53; G01N33/543; G02B1/10; H01L21/306; H01L21/762
Attorney, Agent or Firm:
Kenzo Hara International Patent Office