Title:
シール可能なドア付きウエハー容器
Document Type and Number:
Japanese Patent JP2008500238
Kind Code:
A
Abstract:
A wafer container (20) including an enclosure portion (22) with a door frame defining an opening for insertion and removal of wafers and a door (24) finable in the door frame to seal the enclosure portion. A continuous elastomeric seal (94) extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove (92) in the door. In cross-section, the elastomeric seal has an inset portion (96) and a sealing head (97) coupled by a bridging portion (98). The sealing head has a foot portion (108) projecting from the bridging portion toward the sealing surface of the door, and a head portion (106) extending in a direction generally opposite the foot relative to the bridging portion. The door frame has a seal engaging structure so that when the door is seated in the door frame, the bridging portion of the elastomeric seal contacts the seal engaging structure (112) displacing the bridging portion axiaily toward the sealing surface and causing the head of the sealing head to rotate radially and contact the seal engaging structure (118). The displacement action also affirmatively sets the foot of the sealing head in contact with the sealing surface of the door (58).
Inventors:
Thien, Anthony, Macias
Rye Stud, John
Rye Stud, John
Application Number:
JP2007508628A
Publication Date:
January 10, 2008
Filing Date:
April 18, 2005
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
B65D85/86; B65D85/00; B65D85/30; H01L21/673; H01L21/00
Domestic Patent References:
| JPH0374610A | 1991-03-29 | |||
| JPS6451058A | 1989-02-27 | |||
| JP2003060021A | 2003-02-28 | |||
| JP2002068364A | 2002-03-08 |
Foreign References:
| WO2003042059A1 | 2003-05-22 | |||
| WO2003033377A1 | 2003-04-24 |
Attorney, Agent or Firm:
Okada International Patent Office