Title:
ファイバー状の複合材料ベースのMEMS光スキャナー
Document Type and Number:
Japanese Patent JP2008504574
Kind Code:
A
Abstract:
MEMS can be fabricated from fibers without the use of a matrix material. Devices can be built where fibers are attached only at a substrate edge (e.g. cantilevers, bridges). Motions can be controlled by adjusting the linkage between multiple fibers with weak coupling (e.g. base, tip, in-between). Driving mechanisms include base-forcing (magnetics, piezo, electrostatics) or tip forcing (magnetics). Mirrors may be formed on free ends of cantilevers to form optical scanners.
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Inventors:
Desai, Shah Yaan
Application Number:
JP2007518324A
Publication Date:
February 14, 2008
Filing Date:
June 24, 2005
Export Citation:
Assignee:
Cornell Research Foundation, Inc.
International Classes:
B81B3/00; G02B26/10; B81C3/00; G02B26/08
Domestic Patent References:
| JPH10325935A | 1998-12-08 |
Foreign References:
| US20040082247A1 | 2004-04-29 |
Other References:
JYH-MING TING AND B. C. LAN: "Formation of nodulated vapor grown carbon fiber", CARBON, vol. 38, no. 14, JPN6010030173, 2000, pages 1917 - 1923, XP004211937, ISSN: 0001957333, DOI: 10.1016/S0008-6223(00)00021-X
A. N. NETRAVALI, ET AL.: "F04-CR02 Fibrous Micro-electro-mechanical-systems (MEMS)", NATIONAL TEXTILE CENTER ANNUAL REPORT, JPN7010001715, November 2004 (2004-11-01), pages 1 - 4, ISSN: 0001957334
A. N. NETRAVALI, ET AL.: "F04-CR02 Fibrous Micro-electro-mechanical-systems (MEMS)", NATIONAL TEXTILE CENTER ANNUAL REPORT, JPN7010001715, November 2004 (2004-11-01), pages 1 - 4, ISSN: 0001957334
Attorney, Agent or Firm:
Yoshiyuki Osuga