Title:
ピラニ圧力計
Document Type and Number:
Japanese Patent JP2008507708
Kind Code:
A
Abstract:
A Pirani pressure gauge comprises a heated, coiled sensing element formed from an alloy comprising platinum and iridium, for example, 90/10 Pt/Ir. This enables the gauge to be deployed in a corrosive environment and reliably measure pressures as low as 10-4 mbar over a prolonged period of time.
Inventors:
Cadder Wallyd Ahmed
Holm Alan Edward
Holm Alan Edward
Application Number:
JP2007523139A
Publication Date:
March 13, 2008
Filing Date:
July 12, 2005
Export Citation:
Assignee:
The BOC Group plc
International Classes:
G01L21/12
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda