Title:
搬送システム
Document Type and Number:
Japanese Patent JP2008510673
Kind Code:
A
Abstract:
A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.
Inventors:
Gilchrist Ulysses
Bufano Michael El.
Fosnite William
Hoffmeister Christopher
Friedman Gerald M.
Bufano Michael El.
Fosnite William
Hoffmeister Christopher
Friedman Gerald M.
Application Number:
JP2007530215A
Publication Date:
April 10, 2008
Filing Date:
August 24, 2005
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
B65G35/00
Domestic Patent References:
| JP2002060006A | 2002-02-26 |
Attorney, Agent or Firm:
Motohiko Fujimura
Shigeyuki Nagaoka
Shigeyuki Nagaoka