Title:
背面検知および単一ASICによる差圧測定
Document Type and Number:
Japanese Patent JP2008511005
Kind Code:
A
Abstract:
Differential pressure sensor systems and methods are disclosed, including an absolute pressure sensor composed of a plurality of pressure sense die for detecting sensed media, wherein each of the pressure sense die possess a back side and a front side and are respectively associated with a plurality of varying pressures. The sensed media are applied only at the backside of the pressure sense die, thereby preventing wire bonds and active regions associated with the front side of the pressure sense die from exposure to sensed media and attack from acids and abrasive chemicals associated with the sensed media.
Inventors:
Femme, Twen Vie
Wade, Richard A
Rain, Philip Eye
Parker, Gregory Dee
Wade, Richard A
Rain, Philip Eye
Parker, Gregory Dee
Application Number:
JP2007530097A
Publication Date:
April 10, 2008
Filing Date:
August 23, 2005
Export Citation:
Assignee:
Honeywell International Inc.
International Classes:
G01L13/06
Attorney, Agent or Firm:
Kazuo Shamoto
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Takami Ito
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Takami Ito