Title:
少なくとも2つの間隙寸法と、活性コンデンサ空間の外側に配置された行程ストッパを備えているZ軸加速度計
Document Type and Number:
Japanese Patent JP2008529001
Kind Code:
A
Abstract:
An accelerometer includes a pair of conductive plates fixedly mounted on a substrate surface, a structure coupled to the substrate surface and suspended above the conductive plates, and at least one protective shield mounted on the substrate surface. The structure includes two regions of differing total moments disposed above a respective conductive plate and separated by a flexure axis about which the structure rotates during an acceleration normal to the substrate, each region having a substantially planar outer surface and an inner surface having a first corrugation formed thereon. For each of the two regions, an inner gap exists between the first corrugation and an opposing conductive plate, and an outer gap exists between the substantially planar outer surface and the opposing conductive plate, the outer gap being larger than the inner gap. The at least one protective shield is placed apart from either of the conductive plates.
Inventors:
McNail, Andrew Sea
Application Number:
JP2007553092A
Publication Date:
July 31, 2008
Filing Date:
November 30, 2005
Export Citation:
Assignee:
Freescale Semiconductor, Inc.
International Classes:
G01P15/125; B81B3/00
Domestic Patent References:
| JPH05172846A | 1993-07-13 | |||
| JPH1090300A | 1998-04-10 | |||
| JPH11194139A | 1999-07-21 | |||
| JP2000028634A | 2000-01-28 | |||
| JPH05172846A | 1993-07-13 | |||
| JPH11218545A | 1999-08-10 | |||
| JPH09257617A | 1997-10-03 |
Foreign References:
| US5181156A | 1993-01-19 | |||
| WO2003044539A1 | 2003-05-30 | |||
| US4736629A | 1988-04-12 | |||
| US5581035A | 1996-12-03 | |||
| US6841992B2 | 2005-01-11 | |||
| US5181156A | 1993-01-19 | |||
| WO2003044539A1 | 2003-05-30 |
Attorney, Agent or Firm:
Kazuo Shamoto
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Osamu Hoshino
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Osamu Hoshino