Title:
内面の各部分をコーティングするための方法及びシステム
Document Type and Number:
Japanese Patent JP2008532255
Kind Code:
A
Abstract:
A method and system for coating the internal surfaces of a localized area or section of a workpiece is presented. Conductive structures are inserted into one or more openings of a workpiece to define the section to be coated. In some embodiments, a bias voltage is connected to a workpiece section, which functions as a cathode. A gas source and vacuum source are coupled to each conductive structure through a flow control system. The flow control system enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. Only the section encompassed by the conductive structures is coated. When the coating process is completed, a means for varying the conductive structures along the length is utilized to move onto the next section to be coated.
Inventors:
Dodope, Andrew, William
Boardman, william, john
Mercado, Raul, Donate
Contreras, Frederick
Boardman, william, john
Mercado, Raul, Donate
Contreras, Frederick
Application Number:
JP2008500818A
Publication Date:
August 14, 2008
Filing Date:
March 06, 2006
Export Citation:
Assignee:
Sub-One Technology, Incorporated
International Classes:
H05H1/24; C23C16/503; C23C26/00
Domestic Patent References:
| JPH1192920A | 1999-04-06 | |||
| JPH02258966A | 1990-10-19 | |||
| JPS54107939A | 1979-08-24 | |||
| JPS5635768A | 1981-04-08 |
Attorney, Agent or Firm:
Takayuki Hirose